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CSR Issue Jan-Feb 2022
Chip Scale Review
January February 2022
Volume 26, Number 1

White-light scanning interferometry (WSI) applied for 100% fine-pitch interconnect inspection during wafer-level packaging. The WSI system includes scanning interferometry for large FOV, highspeed, and multi-reflectance surface 3D measurement. Interference patterns can be detected to calculate RDL dielectric layer thickness during panel/wafer-level 3D interconnect inspection.
Cover image courtesy of INTEKPLUS CO.,LTD.

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