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Biographies
Cheryl Hartfield is Solutions Manager, ZEISS Semiconductor Manufacturing Technology, Process Control
Solutions, Pleasanton, CA. She received her MA and BS in Microbiology from UT Southwestern Medical Center,
and Texas A&M, respectively. She co-founded Omniprobe and was Senior Member of Technical Staff at Texas
Instruments, working for 12 years in characterization and package development. Cheryl is an ASM Fellow and
Past President of EDFAS. She has >13 patents and authored >70 papers. Email cheryl.hartfield@zeiss.com
Marcus Kaestner is Project Manager, ZEISS Semiconductor Manufacturing Technology, Process Control Solutions,
Oberkochen, Germany. He received his PhD and MS in Micro- and Nanotechnologies from Technical U. of Ilmenau.

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