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A new RDL-first FOWLP for low-density applications



        By Isamu Nishimura, Mamoru Yamagami, Hiroshi Oji, Taro Hayashi  [ROHM Co., Ltd.]

        A         s Mo or e’s L aw dev ic e   W h ile FOW LP a nd FOPLP a re   performance. In addition, we have




                  scali ng approaches it s
                                           applications, we  are  targeting low-
                                                                              s m a l l er,  t h i n n er  a n d  e n a b li n g
                  limits, a variety of “More   attracting attention for high-density   added value by creating products
        than Moore” breakthrough technologies   density applications, which have a   modularization. Businesses in the
        are attracting attention [1]. For example,   relatively small number of pins and   field of  low-density applications,
        fan-out packages such as fan-out wafer-  a small package size. We provide   however, also require technology
        level package (FOWLP) and fan-out   FOWLP technology, called RISPAC,   that meets low-cost requirements.
        panel-level package (FOPLP) have been   for low-density  applications using   Therefore, our FOWLP production
        proposed by various companies, and   the mass production capabilities of   line has selected the redistribution
        materials and equipment to support   large-scale integration (LSI). This   layer (RDL)-first (or RDL-1st) process
        them have been developed [2,3]. These   capability effectively combines front-  that utilizes legacy 8-inch wafer LSI
        fan-out packages are normally designed   end wafer technology and back-end   manufacturing  based  on  its  lower
        for the high-density application field,   package assembly technology.  costs (equipment, substrate, etc.). The
        which enables high functionality for   By using our FOWLP technology,   RDL-1st FOWLP has a cost advantage
        5G, artificial intelligence (AI), Internet   it i s p o s sible t o r e d uc e t he ON   because it can reduce the losses of the
        of Things (IoT), etc., with 2D, 2.5D, 3D   resistance of devices, increase power   mounting dies. Other considerations
        packaging technologies.            efficiency, and improve switching   related to low cost are: 1) the number












































        Figure 1: Comparison of switching performance.

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