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CSR Issue Jan-Feb 2020
Chip Scale Review
January February 2020
Volume 24, Number 1

Wafer geometry is vital for process control at the front end of line, and ultimately, device yield. Additionally, as wafer thinning becomes ever more critical at the far back end of line, so too, is being able to quickly measure wafer geometry (e.g., nanotopography, roughness) on the entire wafer. Not only has wavefront phase imaging been shown to be a good candidate for FEOL and FBEOL applications, it is also showing promise for global wafer geometry measurements on patterned wafers during BEOL processes.
Photo courtesy of iStock/Norman Cooper

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In 2020, Chip Scale Review had its ongoing focus on the technologies that facilitated the evolution of semiconductor performance in all of the categories that were of meaningful significance. Industry experts heeded Chip Scale Review’s call for QC/AI/next-generation computing content, and as a result, we were able to publish several relevant articles in 2020 that included: 1) “Post-Moore’s Law electronics: now, until quantum electronics,” (R. Tummala/Georgia Tech, Mar/Apr) 2) AI’s impact on 3D packaging: heterogeneous integration,” (S. Kumar/ Yole Développement, Korea, May/June); 3) “Electronic packaging for future electronic systems,” (M. Töpper, T. Braun, R. Aschenbrenner/Fraunhofer IZM, Jul/Aug); 4) “Enabling AI with heterogeneous integration,” (N. Fan/ ASM Pacific Technology Ltd., Sept/Oct); 5) “A deep-learning solution for heterogeneous package inspection,” (S. Chitchian/INTEKPLUS Corporation Ltd., Sept/Oct); and 6) “Enabling AI with heterogeneous integration,” (A. Kumar, M. Farooq/IBM Research, Nov/Dec).