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        Figure 7: Schematic representation of an RF Si interposer with integrated InP and CMOS devices and antenna   10.1109TED.2017.2761766.
        array in a package.
                                                                                7.  Y. Zhang et al., “720-V/0.35-mΩ.
                                                                                     2
        heterogeneous integration option uses   Acknowledgment                     cm  Fully Vertical GaN-on-Si Power
        a layer stack with lithography-defined   This paper was originally published   Diodes by Selective Removal of Si
        connections and even through-Si vias to   in Compound Semiconductor (Vol. 29/  Substrates and Buffer Layers,” IEEE
        communicate between III/V- and CMOS-  Issue 5/pp. 46-51). It has been edited for   Electron Device Letters, vol. 39,
        based components. In this case, the III/  republication in Chip Scale Review.  Issue 5, pp. 715-718.
        V devices sit next to the CMOS chip,                                    8.  K . H a r r o u ch e , e t  a l .,“ H ig h
        enabling better thermal management   References                            performance and highly robust
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                       Biography
                         Nadine Collaert is a Fellow and a Program Director at imec, Leuven, Belgium. She’s currently responsible for the
                       advanced RF program looking at the heterogeneous integration of III-V/III-N devices with advanced CMOS to tackle
                       the challenges of next-generation mobile communication. Previously, she was a Program Director of the logic beyond
                       Si program and has also been involved in the theory, design, and technology of FinFET devices, emerging memories,
                       and more. She has a PhD in Electrical Engineering from the KU Leuven, (co-) authored more than 400 publications,
                       and holds more than ten patents in device design and process technology. Email Nadine.Collaert@imec.be


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