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double-sided SiP – by using high thermal structure. Table 1 shows the simulation
EMC material (K=2.5W/mK) – achieves a result for RLC extraction (i.e., R: lower
20% θJA (1.1x) thermal enhancement, and resistance is better for signal loss, L: lower
a 30% θJB (0.9y) thermal enhancement inductance is better for signal propagation
when compared to using a normal EMC delay control, C: lower capacitance is better
material (K=1.0W/mK). When a thermal for noise and voltage control).
interface material (TIM) is used (Ag epoxy Structural strength analysis. In this
with 25W/mK), the simulation data shows experiment, the warpage performance of
the 0.99x θJA ratio with a 24% thermal different die thicknesses and of different
enhancement and a 0.75y θJB with a 38% packaged die strengths are studied—
thermal enhancement. this is important because the thickness
Warpage performance verification. requirement is getting critical for double-
Another key challenge of the proposed sided SiP platforms. In order to evaluate
double-sided SiP platform is warpage the optimal die thickness and die strength,
performance. The DOE design factors are a series of grinding wheel parameters
defined as standard normal EMC, thermal were selected—for example, the grit sizes
EMC type factor and TIM material. The of the teeth, concentrations, and shapes
package warpage performance is measured of the various teeth (see Figure 5a). As
using the Shadow Moiré methodology shown in Figure 5b, the scanning electron
(JEDEC standard). The normal EMC with microscope (SEM) image shows how a
TIM has a better warpage result (room different grinding wheel selection will result
temperature: -10µm; high temperature: in a surface mark difference. Grinding
13µm) than using a high thermal EMC wheel A is rougher than grinding wheel
material without a TIM (room temperature: B. The finer grinding wheel will have a
-16µm; high temperature: 8µm). The Figure 3: Process flow of a double-sided SiP smooth surface, but a longer manufacturing
difference in these two results is due to the structure (double-sided molding + EMI). time is required to meet the
low coefficient of thermal expansion (CTE) target die thickness because
mismatch during molding of the structure. of the small grit size.
Based on the signed warpage chart result, Another crucial parameter
three legs are within the JEDEC warpage to be considered when
requirement (max. 80µm). And both optimizing ELK stress in a
instances of the normal EMC with a TIM double-sided SiP structure
can pass the warpage requirement for the is die thickness. A stress
double-sided SiP structure. analysis was conducted to
evaluate ELK stress as a
Double-sided SiP structure function of die thickness
(structure 3-3) Table 1: RLC extraction simulation comparison result. at 200µm, 150µm, 100µm,
The sections below discuss electrical
performance verification and structural
strength analysis of structure 3-3/double-
sided molding + EMI (see Figure 2).
Electrical performance verification.
Structure 3-3 shown in Figure 2 and
the process flow shown in Figure 3 are
responses to the demand for miniaturization
of products. Figure 3 provides examples of
SiP structure designs from single-sided SiP
to double-sided SiP that enable the reduction
in package size from 5.00 x 5.40mm
(27mm ) to 3.60 x 3.65mm (13mm ). The
2
2
high degree of integration along with
achieving the required performance are
achieved by using a double-sided stacking
process as shown in Figure 4. The total
area is then reduced by 50%, and better
electrical performance (>40%) is achieved
by using a vertical signal transmission
path and adding a ground (GND) plane on
L2. The RLC extraction can, therefore,
be reduced by using a double-sided SiP
Figure 4: Comparison of single-sided SiP and double-sided SiP structures.
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