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Since the original deployment of this   now have an impedance of 35Ω and this   instrumentation on the surface layer
        probe card last year, we have evolved   required several parts of the interface   of the PCB and loopback paths on
        the design in response to changing   hardware to be redesigned as follows:  lower layers of the PCB. The wider
        customer requirements and to improve                                  trace geometry for 35Ω required the
        functionality in several key areas:   •  A new probe card PCB layout is   position of several other traces to be
                                                required, with trace geometries for   adjusted, but overall, the changes could
           •  The 55GHz mid-band (MB) RF        the MB signals matched to 35Ω in   be accommodated without affecting the
             signals required a change of the   the DUT launch area;          DUT spacing.
             matching impedance from 50Ω to   •  The probe head cross section   However, if only the PCB traces
             35Ω;                               needs to continue to support 50Ω   are changed to 35Ω, this will result in
           •  The alignment mechanism between   impedance matching on LB and   multiple impedance discontinuities as
             the probe head and probe card PCB   other RF signals, but also now   the signal transitions from a 35Ω DUT
             was improved; and                  requires 35Ω impedance matching   to  a  50Ω  probe,  then  to  a  35Ω  PCB
           •  A feasibility study for implementing   for the MB signals; and  and finally, back to a 50Ω RF cable
             denser multi-site test patterns was   •  As t he test equ ipment u sed   connection. This can be simulated
             completed.                         w il l  st il l  be  50 Ω ,  a  35Ω  to   and displayed using a time domain
                                                50Ω  impedance  t ransfor mer   reflectometry (TDR) plot (see Figure 3).
        35Ω impedance matching                  is required, where the signals   The resulting return loss performance
          In the original probe card design,    on the PCB transition from the   i s  e v e n  w o r s e  t h a n  t h e  s i m p l e
        a l l t h e R F s i g n a l s r e q u i r e d a   DUT launch area to RF cable   “renormalized” case, so additional
        matching  impedance  of  50Ω  in  the   connectors.                   design changes are required in the other
        interface hardware to achieve the best                                elements of the signal path.
        performance. This required tuning   Without these changes, test results   The probe head and cViper probe
        of the cross section of the probe head   renor malized  to  35Ω  would  have   cross section also need to match the 35Ω
        body and the 150μm pitch cViper spring   degraded return loss performance and   impedance of the DUT MB signals, but
        probes  to  achieve  a  50Ω  impedance   no longer meet the goal of better than   the challenge here is to maintain 50Ω
        match. The PCB layout was also     -10dB up to 55GHz.                 impedance for all the other signals in the
        simulated and optimized to match the   To evaluate the feasibility of changing   DUT layout. One approach considered
        probe head impedance and provide a   the tightly-packed DUT signal layout,   was to reduce the spacing between the
        50Ω signal path from the DUT ball to   a simpler coupon board design was   150μm-pitch cViper signal probes and
        tester pin.                        star ted, which implemented new    adjacent ground probes by implementing
          In a new customer DUT design, the   35Ω trace geometries for both direct   a wider signal probe. This was not
        MB channels operating at up to 55GHz   connection paths from DUT to tester   possible, as the DUT layout for the




































        Figure 3: TDR plots a) before and b) after optimization; and RL plots c) before and d) after optimization.

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