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excessive heating at reflow. Overheating
                                                                              can also be indicated by a goldish or
                                                                              brownish appearance of the solder.
                                                                              A continuous fillet around the entire
                                                                              perimeter of the die is also indicative of a
                                                                              good thermal profile. The cool-down time
                                                                              to solder solidification is dependent upon
                                                                              the mass of the tooling, components,
                                                                              and weights, together with radiant and
                                                                              conductive heat transfer to the water-
                                                                              cooled process chamber surfaces. The
                                                                              time above liquidus (TAL) is controlled
                                                                              by the ramp-up, reflow, and natural
                                                                              cooling rate of the assembly of tooling,
                                                                              components, and weights. By carefully
                                                                              designing, programming, and monitoring
                                                                              these reflow parameters, an optimal
                                                                              profile can be created, which will produce
                                                                              high-quality, low-void solder interfaces.
        Figure 5: Thermal conductivity inside the chamber as a function of the pressure level.  Acceptance criteria are primarily based
                                                                              on either X-ray or scanning acoustic
        nitrogen gas is introduced into the   There are four key parameters to   microscope (SAM) scan verification after
        chamber. This high pressure gas will   control in a vacuum reflow die attach   die attach reflow. A visual appearance
        collapse or reduce the size of trapped   application: 1) ramp-up time, 2) reflow   of the solder with shiny bright color and
        voids, and in most cases, eliminate the   temperature, 3) cool-down time, and 4)   excellent fillets is also essential and goes
        remaining voids. This technique uses   total time above liquidus (TAL) [4].  hand in hand with low-void content, as a
        Boyle’s Law (P 1 V 1  = P 2 V 2 ) to reduce   The actual programmed ref low   proof of a well-designed reflow profile.
        void sizes.                        temperature of the graphite tooling is   In addition to the previously discussed
          In this application, P 1  is the low   typically much higher than the melting   component metallization pitfalls, inferior
        nitrogen level (<400Torr), and V 1  is   temperature of the solder preform   quality solder preforms will also result
        the original volume of the void. Upon   material. The purpose of this higher   in poor wetting of the molten solder
        rapid introduction of P 2  high-pressure   tooling temperature is to ensure proper   to the components’ gold surfaces. We
        (30-50psig), the volume of void V 2    solder wetting and sealing. A shiny, light-  typically recommend that the preform
        will be reduced by the ratio of P 1 /  colored metallic surface finish on the   be sized to 95% of the designed die area
        P 2 . This is equivalent to reducing or   solder material usually means a proper   to allow sufficient solder to form good
        compressing the void by a factor of 7.5X,   reflow temperature profile (see Figure 7).   fillets without undesired solder outflow to
        or a compression/reduction by 3 to 4   A dull gray appearance is indicative of   adjacent components. The solder preform
        atmospheres (refer to Figure 6). The                                                must also be free of
                                                                                            loose or adhered surface
                                                                                            contaminants and oxides.
                                                                                              The amount of applied
                                                                                            force for each joint is
                                                                                            also critical. The weight
                                                                                            is designed to provide
                                                                                            a sufficient amount of
                                                                                            force to assure good
                                                                                            contact between the die/
                                                                                            component, the preform,
        Figure 6: Boyle’s Law for void reduction.
                                                                                            a n d  t h e  pa c k ag e/
                                           Figure 7: Close up of the soldered GaN die soldered to the package.
        application of high pressure when the
        preform is in a liquid state is critical for
        void reduction/removal. This pressure
        rise should occur near the end of the
        high-temperature reflow soak and must be
        held constant until the solder solidifies.
        The exhaust portion of the profile should
        be programmed only to occur after the
        solder has gone well below the solidus
        temperature or else voids could reappear   Figure 8: a) Typical X-ray view of a GaN die soldered with AuSn to a copper heat sink; and b) A typical void
        or expand back.                    level calculation.

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