Page 4 - Chip Scale Review_January February_2023-digital
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NEXT-GENERATION
OPTICAL LITHOGRAPHY
EVG 150 Resist Processing System
®
Automated spin / spray coating and
development processes in a new, fully
modular, smaller footprint platform.
Outstanding throughput for HVM processes
using a high-speed, high-accuracy robot and
advanced scheduler algorithms.
Guarantees highly uniform coats ranging from
demanding thick resist applications down to
sub-micron layers.
GET IN TOUCH to discuss your manufacturing needs
www.EVGroup.com EVG® 150 (200 mm)
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