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n-TSVs and its potential as a IEEE 72nd Elect ronic Comp. Interconnect Tech. Conf. (IITC),
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Biographies
Naoto Horiguchi is the Logic CMOS Scaling Program Director at imec in Leuven, Belgium. He obtained
a degree in Applied Physics in 1992 from Tokyo U., Japan. He has been with imec since 2006, where he
is engaged in advanced CMOS device R&D together with worldwide industrial partners, universities, and
research institutes. His current focus is CMOS device scaling down to 1nm technology node and beyond. Email
naoto.horiguchi@imec.be

Eric Beyne is a Senior Fellow, VP of R&D, and Program Director of 3D System Integration at imec in
Leuven, Belgium. He obtained a degree in electrical engineering in 1983 and a PhD in Applied Sciences in 1990, both from the
KU Leuven, Belgium. He has been with imec since 1986, working on advanced packaging and interconnect technologies.

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