Page 4 - Chip Scale Review_March April_2023-digital
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NEXT-GENERATION


         OPTICAL LITHOGRAPHY




          EVG 150 Resist Processing System
                      ®



























                  Automated spin / spray coating and
                  development processes in a new, fully
                  modular, smaller footprint platform.


                  Outstanding throughput for HVM processes
                  using a high-speed, high-accuracy robot and
                  advanced scheduler algorithms.


                  Guarantees highly uniform coats ranging from
                  demanding thick resist applications down to
                  sub-micron layers.









            GET IN TOUCH to discuss your manufacturing needs
            www.EVGroup.com                                                                    EVG® 150 (200 mm)
        2 2  Chip Scale Review   March  •  April  •  2023   [ChipScaleReview.com]
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